Release Optimization of Suspended Membranes in MEMS
نویسندگان
چکیده
منابع مشابه
Silicon Sacrificial Layer Dry Etching (SSLDE) for free-standing
A novel Silicon Sacrificial Layer Dry Etching (SSLDE) technique using sputtered amorphous or LPCVD polycrystalline silicon as sacrificial layers and a dry fluorine-based (SF6) plasma chemistry as releasing process is reported with a detailed experimental study of the release etching step. The process is capable of various applications in surface micromachining process, and can be applied in fab...
متن کاملSimulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory
In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understa...
متن کاملUltra-thin Graphene/Polymer Layered Composite Membranes for NEMS applications
Single layer chemical vapor deposited (CVD) graphene has shown great promise in enabling Micro and Nanoelectromechanical Systems (MEMS/NEMS) that can outperform current silicon-based state of the art. However, current methods in forming single layer graphene MEMS devices result in low yields due to capillary effects acting on the suspended material during the graphene transfer process. In addit...
متن کاملA Novel MEMS Technological Platform Aimed at RF Applications
A novel MEMS technological platform for RF passive components, namely RF MEMS switches, tuneable capacitors and high-Q suspended inductors, is reported. The proposed process employs a metal (Al, AlSi or Cu) as active movable layer and amorphous silicon or polycrystalline silicon as sacrificial layers, providing multi-air-gaps. Various types of substrates like bulk silicon and SOI can be used. F...
متن کاملHierarchical MEMS Synthesis and Optimization
A hierarchical MEMS synthesis and optimization architecture has been developed for MEMS design automation. The architecture integrates an object-oriented component library with a MEMS simulation tool and two levels of optimization: global genetic algorithms and local gradient-based refinement. An object-oriented data structure is used to represent hierarchical levels of elements in the design l...
متن کامل